Dopant Characterization Round-Robin Study Performed on Two-Dimensional Test Structures

J. Vahakangas et al.

类型: 论文
作者: J. Vahakangas et al.
出版: NIST / International Conference on Characterization and Metrology for ULSI Technology · 1998
原始链接: 打开原始来源（新标签页）

本站引用的位置2 处，涉及 2 个知识点

NIST publication overview，Dopant Characterization Round-Robin Study，cross-method comparison scope
APT 与 SIMS 三维及深度成分剖析
Web publication §§Abstract, round-robin design and results，seven groups, SCM/SSRM/TEM/SIMS/model comparison
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