Semiconductor Metrology and 3D Chemical and Structural Imaging

本站引用的位置2 处，涉及 3 个知识点

1. §3D Chemical and Structural Imaging，electron microscopy, tomography and atom-probe capabilities

   材料结构分析与失效制样 发光器件缺陷定位与失效分析

2. NIST semiconductor metrology §§SEM, TEM/STEM, FIB, EDS/EELS and 3D imaging capabilities

   SEM、TEM 与 AFM 成像及尺寸计量